Information:

• Model: RTA-WTA-9000-18000
• Throughput：9000-18000
• Breakage ratio：0.01%@166；0.02%@182；0.03%@210
• Uptime: ≥ 99%
• Double wafer detection
• breakage inspection and crack detection
• All-in-one welded steel frame%MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model：ET-V8000/15000
• Throughput ： 8000-15000 pcs/hour
• Breakage ratio：M10< 0.01%/M12< 0.02%
• Uptime: ＞98%

Characteristics:

• Alkaline texturing for PERC , TOPCon high efficiency solar cells
• Texturing and cleaning with solar cell
• Long bath lifetime design
• Avoid cross-contamination and overtime
• Upgrade related materials to avoid precipitation of impurities.

Information:

• Throughput：12000
• Breakage ratio：0.01%@182；0.02%@210
• Uptime: ≥ 99%
• Linear motor gantry system or 6 axis robot system
• High speed and stable gantry system with linear motor
• Breakage inspection and quartz boat positioning with vision system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Throughput：20000-30000
• Breakage ratio：0.01%@182；0.02%@210
• Uptime: ≥ 99%
• Linear motor gantry system or 6 axis robot system
• High speed and stable gantry system with linear motor
• Breakage inspection and quartz boat positioning with vision system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Throughput：20000-30000
• Breakage ratio：0.01%@182；0.02%@210
• Uptime: ≥ 99%
• Linear motor gantry system or 6 axis robot system
• High speed and stable gantry system with linear motor
• Breakage inspection and quartz boat positioning with vision system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model：RCL-I 8000/14000
• Throughput： 8000-14000pcs/hour
• Breakage ratio：≤0.02%（Silicon wafer size above M10 ）
• Uptime: ＞ 98%

Characteristics:

• Rear side clean for high efficiencysolar cells, for example PERC & TOPCon
• PSG/BSG removal
• Excellent uniformity, long bath life time.
• High capacity, low cost.

Information:

• Throughput： 8000-15000pcs/hour
• Breakage ratio： M10< 0.01%/M12<0.02%
• Uptime: ＞ 98%

Characteristics:

• Alkaline polish for high efficiencysolar cells, for example PERC and TOPCon
• Used for polishing, etching and cleaning treatment
• With dry clean area and self-cleaning system
• Avoid cross-contamination and reaction overtime
• Upgrade related materials to avoid precipitation of impurities
• Intelligent machine, energy consumption, statistical analysis function
• High throughput、Low CoO
• Suitable MES and RFID

Information:

• Model: RTA-WPA-8000-16000
• Throughput：8000-16000
• Breakage ratio：0.02%@182；0.03%@210
• Uptime: ≥ 99%
• Double wafer detection,breakage inspection and crack detection
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model: RTA-PE-4000-9000
• Throughput：4000-9000
• Breakage ratio：0.04%@182；0.05%@210
• Uptime: ≥ 99%
• Staubli or Fanuc 6 axis robot
• Warpage and graphite boat positioning with vision system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model: RTA-ALD-6000-16000
• Throughput：6000-16000
• Breakage ratio：0.04%@182；0.05%@210
• Uptime: ≥ 99%
• Intergrated load and unload design
• Automatic breakage cleaning system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model: RTA-SRT-8000
• Throughput：8000@166；7500@182；7200@210
• Breakage ratio：≤0.06%@166；0.08%@182；0.08%@210
• Uptime: ≥ 99%
• Offline and online mode
• Free grading system
• AOI/IV/EL front and read inspection
• All-in-one welded steel frame
• Single lane and dual lane
• All-in-one configuration
• Optional common lanes solution
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model：RC-I2500/4000
• Throughput： 2500-4000 pcs/hour
• Breakage ratio:≤0.01%
• Uptime: ≥ 98.5%

Characteristics:

• SixNy&Al2O3 film removal for PERC and TOPCon high efficiency solar cells
• Flexible process sequence
• Effective rinsing and drying
• High throughput、Low CoO
• Intelligent machine, energy consumption, statistical analysis function

Information:

• Model：DC-1.0
• Throughput : up to 200/400 carriers per day
• Uptime: ≥ 98%

Characteristics:

• Automatic carriers cleaning, drying
• High efficiency cleaning
• Low CoO

Information:

• Model: RTA-WTA-9000-18000
• Throughput：9000-19000
• Breakage ratio：0.01%@166；0.02%@182；0.03%@210
• Uptime: ≥ 99%
• Double wafer detection
• breakage inspection and crack detection
• All-in-one welded steel frame%MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model：ET-V8000/15000
• Throughput ： 8000-15000 pcs/hour
• Breakage ratio：M10< 0.01%/M12< 0.02%
• Uptime: ＞98%

Characteristics:

• Alkaline texturing for PERC , TOPCon high efficiency solar cells
• Texturing and cleaning with solar cell
• Long bath lifetime design
• Avoid cross-contamination and overtime
• Upgrade related materials to avoid precipitation of impurities.

Information:

• Throughput：12000
• Breakage ratio：0.01%@182；0.02%@210
• Uptime: ≥ 99%
• Linear motor gantry system or 6 axis robot system
• High speed and stable gantry system with linear motor
• Breakage inspection and quartz boat positioning with vision system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Throughput：20000-30000
• Breakage ratio：0.01%@182；0.02%@210
• Uptime: ≥ 99%
• Linear motor gantry system or 6 axis robot system
• High speed and stable gantry system with linear motor
• Breakage inspection and quartz boat positioning with vision system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model：RCL-I 8000/14000
• Throughput： 8000-14000pcs/hour
• Breakage ratio：≤0.02%（Silicon wafer size above M10 ）
• Uptime: ＞ 98%

Characteristics:

• Rear side clean for high efficiencysolar cells, for example PERC & TOPCon
• PSG/BSG removal
• Excellent uniformity, long bath life time.
• High capacity, low cost.

Information:

• Throughput： 8000-15000pcs/hour
• Breakage ratio： M10< 0.01%/M12<0.02%
• Uptime: ＞ 98%

Characteristics:

• Alkaline polish for high efficiencysolar cells, for example PERC and TOPCon
• Used for polishing, etching and cleaning treatment
• With dry clean area and self-cleaning system
• Avoid cross-contamination and reaction overtime
• Upgrade related materials to avoid precipitation of impurities
• Intelligent machine, energy consumption, statistical analysis function
• High throughput、Low CoO
• Suitable MES and RFID

Information:

• Model：CB-V8000/1400
• Throughput ： 8000-14000 pcs/hour
• Breakage Ratio：M6≤0.01%/ M12≤0.02%
• Uptime: ≥ 98%

Characteristics:

• Winding removal for TOPCon solar cell
• Self-clean design
• Avoid cross contamination and reaction timeout
• All materials in contact with liquid shall be optimized and upgraded to avoid precipitation of impurities
• Compatible with MES and RFID functions
• Intelligent machine, energy consumption, statistical analysis function

Information:

• Model: RTA-WPA-9000-15000
• Throughput：8000-16000
• Breakage ratio：0.02%@182；0.03%@210
• Uptime: ≥ 99%
• Double wafer detection,breakage inspection and crack detection
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model: RTA-PE-4000-9000
• Throughput：4000-9000
• Breakage ratio：0.04%@182；0.05%@210
• Uptime: ≥ 99%
• Staubli or Fanuc 6 axis robot
• Warpage and graphite boat positioning with vision system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model: RTA-ALD-6000-16000
• Throughput：6000-16000
• Breakage ratio：0.04%@182；0.05%@210
• Uptime: ≥ 99%
• Intergrated load and unload design
• Automatic breakage cleaning system
• All-in-one welded steel frame
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model: RTA-SRT-8000
• Throughput：8000@166；7500@182；7200@210
• Breakage ratio：≤0.06%@166；0.08%@182；0.08%@210
• Uptime: ≥ 99%
• Offline and online mode
• Free grading system
• AOI/IV/EL front and read inspection
• All-in-one welded steel frame
• Single lane and dual lane
• All-in-one configuration
• Optional common lanes solution
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model：RC-I2500/4000
• Throughput： 2500-4000 pcs/hour
• Breakage ratio:≤0.01%
• Uptime: ≥ 98.5%

Characteristics:

• SixNy&Al2O3 film removal for PERC and TOPCon high efficiency solar cells
• Flexible process sequence
• Effective rinsing and drying
• High throughput、Low CoO
• Intelligent machine, energy consumption, statistical analysis function

Information:

• Model：DC-1.0
• Throughput : up to 200/400 carriers per day
• Uptime: ≥ 98%

Characteristics:

• Automatic carriers cleaning, drying
• High efficiency cleaning
• Low CoO

Information:

• Model：ET-V8000
• Throughput： 8000pcs/hour
• Breakage Ratio：M6< 0.01%/M10< 0.02%
• Uptime: ＞95%

Characteristics:

• High efficiency HJT solar cell Texturing
• Long bath life time design
• Avoid cross contamination and reaction timeout
• Partition design of acid/alkali washing area
• ESD protection design
• All materials in contact with liquid shall be optimized and upgraded to avoid precipitation of impurities
• Compatible with MES and RFID functions
• Intelligent machine, energy consumption, statistical analysis function

Information:

• Model: RTA-PECVD-3500-9000
• Throughput：3500-9000
• Breakage ratio：≤0.05%@166；0.06%@182；0.06%@210
• Uptime: ≥ 99%

Characteristics:

• Inline or U shape layout
• Patened wafer conveyors design to reduce the contact times of wafer
• Class 1000 clean room design
• All-in-one welded steel frame
• High speed and stable gantry system with linear motor
• High strength carbon fiber gantry design
• PL,crack detection
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model: RTA-PVD-3500-9000
• Throughput：3500-9000
• Breakage ratio：≤0.05%@166；0.06%@182；0.06%@210
• Uptime: ≥ 99%

Characteristics:

• Inline or U shape layout
• Class 1000 clean room design
• All-in-one welded steel frame
• High speed and stable gantry system with linear motor
• PL,crack detection
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer

Information:

• Model: RTA-SRT-8000
• Throughput：8000@166；7500@182；7200@210
• Breakage ratio：≤0.06%@166；0.08%@182；0.08%@210
• Uptime: ≥ 99%
• Offline and online mode
• Free grading system
• AOI/IV/EL front and read inspection
• All-in-one welded steel frame
• Single lane and dual lane
• All-in-one configuration
• Optional common lanes solution
• MES interface and remote debug
• Smart IGV interface
• OEE statistics and energy consumption analysis
• Compatible with M10,M12 full size and half cut size wafer