Texturing
Diffusion
Polishing
Passivation
Testing
Auxiliary
Layout Size
Texturing loader and unloader
RTA-WTA-9000-18000
Information:
Batch Texturing Equipment
Information:
Characteristics:
Layout Size
Diffusion/Annealing/LPCVD loader and unloader
RTA-DIA12000-U-2R-12
Information:
Layout Size
Diffusion/Annealing/LPCVD loader and unloader
RTA-ARK20-30000-T
Information:
Layout Size
Diffusion/Annealing/LPCVD loader and unloader
RTA-ARK20-30000-I
Information:
Inline PSG removal
Information:
Characteristics:
Batch-Alkaline Polish Equipment
Information:
Characteristics:
Layout Size
Wet Etch Processing Automation Edge isolation+Polish+PSG removal
RTA-WPA-8000-16000
Information:
Layout Size
PECVD Processing Automation
RTA-PE-4000-9000
Information:
Layout Size
ALD (Plate)
RTA-ALD-6000-16000
Information:
Layout Size
Tester and Sorter
RTA-SRT-7500
Information:
Rework washer
Information:
Characteristics:
Carrier clean
Information:
Characteristics:
Texturing
Diffusion
Polishing
Passivation
Testing
Auxiliary
Layout Size
Texturing loader and unloader
RTA-WTA-9000-18000
Information:
Batch Texturing Equipment
Information:
Characteristics:
Layout Size
Diffusion/Annealing/LPCVD loader and unloader
RTA-DIA12000-U-2R-12
Information:
Layout Size
Diffusion/Annealing/LPCVD loader and unloader
RTA-ARK20-30000-T
Information:
Inline PSG/BSG removal
Information:
Characteristics:
Batch-Alkaline Polish Equipment
Information:
Characteristics:
Layout Size
Winding Removal
Information:
Characteristics:
Wet Etch Processing Automation Edge isolation+Polish+PSG removal
RTA-WPA-9000-15000
Information:
Layout Size
PECVD Processing Automation
RTA-PE-4000-9000
Information:
Layout Size
ALD (Plate)
RTA-ALD-6000-16000
Information:
Layout Size
Tester and Sorter
RTA-SRT-7500
Information:
Rework washer
Information:
Characteristics:
Carrier clean
Information:
Characteristics:
Texturing
Intrinsic deposition
TCO deposition
Copper plating
Testing
HJT texturing
Information:
Characteristics:
PECVD Automation
Information:
Characteristics:
PVD Automation
Information:
Characteristics:
Layout Size
Tester and Sorter
RTA-SRT-7500
Information: